Fabtronics Ltd High Temperature Quartz Bath Etch Hot Pot & Partical count and Monitoring Filtration systems

Semiconductor Process

Product Information Sheets (pdf format)

  • In-Situ Particle Monitoring in a Vertical Poly Furnace (web)   (pdf)
      by Pete Glass, Joe Kudlacik – IBM Microelectronics
     & Ray Burghard – Pacific Scientific Instruments Group
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Tel: +44 (0)141 884 4186 Fax: +44 (0)141 884 4186

email: W.Fullerton@FabTronics.co.uk
www.FabTronics.co.uk