Semiconductor Process Application Information Chart 1 - FabTronic Ltd

Semiconductor Process Control
Semoiconductor High Temperature Etch Bath & Process control Fabtronics Hot Pot & Etch Bath Service Service Support & Repair of High Temperature Etch Bath and Partical count control Etch Bath WetBench & Partical count control data & Information Fabtronics Fast Responce Enquiry Form

PRODUCT APPLICATION CHART 1 Teflon® lined Inert ultra-clean Chemical Etch Processing Bath

PROCESS

DESCRIPTION

CHEMICAL COMPOSITION

PROCESS TEMP

RECOMMENDED PRODUCT

AQUA REGIA

GOLD ETCHANT

HYDROCHLORIC ACID

NITRIC ACID

90oC

SQP WITH LID

BUFFERED OXIDE ETCH

SiO2 ETCH

AMMONIUM FLUORIDE

HYDROFLUORIC ACID

20-40OC

ST

CP8

ETCH

HYDROFLUORIC ACID

NITRIC ACID

20OC

ST

PVDF

METAL ETCH

Al, AlSi, AlSiCu

PHOSPHORIC ACID

ACETIC ACID

NITRIC ACID

30-60OC

SQ

METALLISED RESIST

RESIST REMOVAL

CHROMIC/ SULPHURIC ACID

40-50OC

SQP

NITRIDE ETCH

ETCH

PHOSPHORIC ACID

DI WATER

150-180OC

CRN

ORGANIC DEVELOPER

RESIST DEVELOP

DOW DS3000

TRI-ISO PROPYL BENZENE

50O

SS

ORGANIC STRIPPER

RESIST REMOVAL

DOW ST3000

DODECYLBENZENE

SULPHONIC ACID

90OC

SQP

ORGANIC STRIPPER

RESIST REMOVAL

EKC NOPHENOL-922

EKC 830

EKC265

MERCK LOZOLIN

20-120OC

SS

OXIDE RESIST STRIP

SiO2 RESIST STRIPPING

SULPHURIC ACID

AMMONIUM PERSULPHATE

20-40OC

SQ

PHENOLIC STRIPPER

RESIST REMOVAL

EKC J100

KTI R-10

90-100OC

SQ

PLATINUM

NICHROME ETCH

ETCH

HYDROCHLORIC ACID

NITRIC ACID

70OC

SQ

FabTronics Ltd

23 Braeview Drive Paisley PA2 8PW
Tel: +44 (0)141 884 4186 Fax: +44 (0)141 884 4186

email: Info@FabTronics.co.uk
www.FabTronics.co.uk

Note: Process Temperatures are typical. For other temperatures and processes please contact FabTronics Limited