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FabTronics Etch & Process baths

FabTronics Baths

All tanks feature external non-immersion sensors and elements, an independent upper-limit circuit, external heating element, and seamless PVDF or Fire-Retardant Polypropylene enclosure.

FabTronics's static bath series are designed and manufactured to meet the highest performance specifications in today's IC manufacturing environment. Our standard models include:

Model SQ (Quartz) - The ultrapure (99.99%) semiconductor-grade fused silica vessel offers excellent thermal and corrosion resistant performance. In addition to offering superior strength and maximum contamination control, our GE Plate124 or molded, fused quartz vessels are ideal for a wide variety of processes and temperatures in the 30 degrees C to 190 degrees C range.
Model SS (Stainless Steel) -The stainless steel process vessel is ideal for safe, reliable solvent processing. These baths are manufactured of 316 stainless steel and feature fully radiused corners. To aid in contamination control the interior is electro-polished to a glossy finish. With direct bottom draining as an option, these tanks are ideal for temperature-controlled processing of solvents and other compatible liquids in the 30 degrees C to 150 degrees C range. We offer a variety of sizes in all models to accommodate single or double 4" through 8" cassettes.
Model ST ( Fluoropolymer-lined) - This inert Teflon® lined vessel delivers rugged, safe, ultra-clean chemical processing advantages. These vessels are lined with Teflon® (PFA) bonded to 316 stainless steel outer shells. 10,000 Volt spark tested, these baths have the ability to handle a wide variety of etchants, cleaners, strippers, and solvents. Built to withstand the toughest process chemistry in the 30 degrees C to 150 degrees C temperature range, these vessels are best suited to applications not applicable to quartz or other silica vessels.
Model HTR Series III - This High Temperature Recirculation system is designed for high temperature Wet Etching, Stripping and Cleaning applications. Recirculation prolongs acid life, reduces disposal costs, provides greater equipment utilisation and ensures continuous effective filtration of particulates that result in performance with higher yields. Process vessels are constructed of moulded, ultrapure Quartz that feature a high gloss, fire polished finish for maximum contamination control. Standard sizes accommodate single and double 4, 5, 6 and 8 inch cassettes.

For other options, contact FabTronics Ltd.

We offer a full range of tank options including angle or flat flange, NPS, NPT, or Flartek® drains, stirwells, in-wall fiber optic liquid level sensors, stir brackets, thermocouples, and temperature sensors and brackets.

FabTronics Ltd

23 Braeview Drive Paisley PA2 8PW
Tel: +44 (0)141 884 4186 Fax: +44 (0)141 884 4186

email: Info@FabTronics.co.uk
www.FabTronics.co.uk