Quartz Hot Pot High Temperature Baths Corrosive Environments Etch Baths Etching Systems corrosion Semiconductor Process Equipment Temperature Controlled Etching Baths Acid Wetbenches hydrochloric acid aqueous hydroxylamine hydrochloride sodium hydroxide titrated pH Ps aeruginosa Acid Etching Baths Laminar Acid Flow Hoods Auto Disinfectors Sterilising Fume Safety Chemical Distribution Systems Day Tank Carousel Storage Cabinet Pass Throughs Fume Cupboards Parts Cleaning Benches Catch Cup Cleaners Nitride Baths Hot Pots Particle Counting in Chemicals Clean Air Hoods Fume Extraction Fume Scrubbing Resist Stripping Wet Benches Solvent Wet Benches Shield Cleaning Novazonic Chemical Monitoring Hot Pots Particle Monitoring Process Baths Liquid Monitoring Etch Baths Etch Monitoring Cleaning Tanks CMP Monitoring Temperature Etch Analysis Wafer Tanks Piranha Tanks Sulphuric / Peroxide Strip LPCVD Etch LPCVD Etch Wet Etch Baths Ozone Nitride Etch Blue Water SC1 Baths Ozonated Water SC2 Baths Ozone Stripping Reflux Systems Filter Etch Baths Wafer Carrier Stripping Tanks Wafer Holder Condensing Lid Photo-resist Strip QuartzLiquid ISPM
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Model HTR Series III - FabTronics Baths |
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FabTronics Baths
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FabTronics's static bath series are designed and manufactured to meet the highest performance specifications in today's Semiconductor manufacturing environment. Our standard models include:Model HTR Series III - Semiconductor Process BathThe Model HTR Series III High Temperature Recirculation system is designed for high temperature Wet Etching, Stripping and Cleaning applications. Recirculation prolongs acid life, reduces disposal costs, provides greater equipment utilisation and ensures continuous effective filtration of particulates that result in performance with higher yields. Process vessels are constructed of moulded, ultrapure Quartz that feature a high gloss, fire polished finish for maximum contamination control. Standard sizes accommodate single and double 4, 5, 6 and 8 inch cassettes. |
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All tanks feature external non-immersion sensors and elements, an independent upper-limit circuit, external heating element, and seamless PVDF or Fire-Retardant Polypropylene enclosure. |
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We offer a full range of tank options including angle or flat flange, NPS, NPT, or Flartek® drains, stirwells, in-wall fiber optic liquid level sensors, stir brackets, thermocouples, and temperature sensors and brackets. |
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